| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bc8d5b80410c3a0594da023cfabcbe0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S95-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-151
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-4006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B39-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0837 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-02 |
| filingDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_491c07b543a0d60ce1df0846876bd184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e81143cc9a23d67c1c766315d957bd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_843758b99cf92a1b70faebd0aad11e79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfaf90ca2e858087d871e4acdbb60561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7f500f7723bbfe8d9f4aa4dde248215 |
| publicationDate |
2007-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1765485-A1 |
| titleOfInvention |
Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite |
| abstract |
Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3 A, 4A or 5 A which is ion exchanged with alkali earth metal and is thermally treated at 150 to 600°C for 0.5 to 100 hours so as to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom. |
| priorityDate |
2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |