| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4581 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 |
| filingDate |
2006-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7afc6bfd99faba8009fc1449c214ea2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea93031516fb5c15c47b87f52fe4f681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d7a2787c0b405bc27e90ff3257c1894
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b724eb889393ad216b3a66ed6a79aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc61078201854b8548c87a1755375d75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2083d342992ef94225f2be9f572b945a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20a7071ca62368fb1a219fc51bdf8d89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7bbed2d80554cfa246d8afbf7f56f32 |
| publicationDate |
2011-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1760170-B1 |
| titleOfInvention |
Chemical vapor deposition apparatus |
| priorityDate |
2005-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |