| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06711
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16H48-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49155 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63H29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63H30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63H31-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B60K17-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16H1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A63H17-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A63H30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A63H29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A63H31-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A63H30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16H48-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16H1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16H1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A63H31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-14 |
| filingDate |
2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ea0951a50c518406bf4bef4bd6e4b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eda55fadd87e692b2caf6fb4f72eb627
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229fdfa766d6365a3be06b87b7224ae0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05f8f6645abaaa0bafde73e6467239b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_346643f4b2653f636b9da240c5193618 |
| publicationDate |
2007-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1744167-A1 |
| titleOfInvention |
Sheet-like probe, method of producing the probe, and application of the probe |
| abstract |
[Problem] n It is an object to provide a sheet-like probe in which a stable connecting state can also be achieved for a circuit device having minute electrodes at a fine pitch, an electrode structure can be prevented from slipping from an insulating film so that a high durability can be obtained, a positional shift of the electrode structure from an electrode to be inspected can be reliably prevented from being caused by a change in a temperature in a burn-in test for a circuit device in which a wafer has a large area and the electrode to be inspected has a small pitch, and an excellent connecting state can be maintained stably, and a method of manufacturing the same. n [Means for Solving Problems] n A sheet-like probe according to the present invention comprises: nan insulating layer; and na contact film including a plurality of electrode structures disposed on the insulating layer apart from each other in a planar direction thereof and extended to penetrate in a direction of a thickness of the insulating layer, neach of the electrode structures including: na surface electrode portion exposed from a surface of the insulating layer, projected from the surface of the insulating layer, and shaped to have a diameter which is gradually reduced from the base end toward a tip; na back electrode portion exposed from a back face of the insulating layer; and na short circuit portion extended to penetrate through the insulating layer in a direction of a thickness thereof continuously from a base end of the surface electrode portion and coupled to the back electrode portion, n nwherein a diameter of the base end of the surface electrode portion is larger than a diameter of the end of the side which comes into contact with the surface electrode portion on the short circuit portion, and na thickness of the short circuit portion is larger than a thickness of the insulating layer. |
| priorityDate |
2004-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |