| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f47985b7c371b565f319708450999686 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1461 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate |
2005-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b960b5e1b894986f6677c46266ae43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_454a91478d930a78dfbb6e37220fd0e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99302251fc1c383a620f3a80e3400034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff2a51f6be390ed02455354381571201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d63b70cfec722be0ef980df326d66764 |
| publicationDate |
2018-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1737786-B1 |
| titleOfInvention |
Method of fabricating a mems device with conductive path through substrate |
| priorityDate |
2004-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |