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publicationDate 2006-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1722434-A1
titleOfInvention Fuel cell array formed in a single layer of monocrystalline silicon and fabrication process
abstract Fuel cells are formed in a single layer of conductive monocrystalline silicon (1), composed of a succession of electrically isolated conductive silicon bodies (1A,1B,1C,1D) separated by narrow parallel trenches etched through the whole thickness of the silicon layer. Semicells in a back-to-back configuration are formed over etch surfaces of the separation trenches. Each semicell is formed on the etch surface of one of said silicon bodies forming an elementary cell in cooperation with an opposite semicell formed on the etch surface of the next silicon body of the succession. Adjacent semicells are separated by an ion exchange membrane resin filling the separation trench between the opposite semicells constituting a solid electrolyte (PEM) of the elementary cell. Each semicell comprises a porous conductive silicon region (12,13) permeable to fluids, extending for a certain depth from the etch surface of the silicon body, at least partially coated by a non passivable metallic material. Each of said porous and fluid permeable regions communicates with a feed duct (9,10) of a fuel fluid or of oxygen gas that extends parallel to said etch surface inside the conductive silicon body (1A,1B,1C,1D). Preferably, particles of a catalytic electrode material are in contact with said ion exchange resin and with said non passivable metal coat of the porous silicon. n The elementary cells thus formed in a monocrystalline silicon layer may be configured as an array of monopolar cells or as a battery of cells in series by realizing a different distribution of the fluid reagents through the pairs of parallel ducts (9,10) formed inside the conductive silicon bodies of (1A,1B,1C,1D).
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