| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2201-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2201-011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2982
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2327-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-12 |
| filingDate |
2005-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58e6266ae028b7cd6850372f6996d4cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d43a70ad909b3d05046e0fe84045af4 |
| publicationDate |
2006-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1719801-A1 |
| titleOfInvention |
Fluorinated elastomer composition |
| abstract |
The present invention provides a fluorine-containing elastomer composition which has small weight change for all the treatments of NF 3 plasma, O 2 plasma and CF 4 plasma conducted in a manufacturing process of a semiconductor and significant plasma resistance, and a molded article comprising the fluorine-containing elastomer composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2248862-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011083806-A1 |
| priorityDate |
2004-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |