| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24f54aefd7a75822ce9d6a7759e20068 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2245-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0809
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0883 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2406 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 |
| filingDate |
2004-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca9d28bb53d0aa2e451e0a5ef0a8c39e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d25545871eb2ba463f5984b0d66f04dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7069dceebd4ef8dd142a43eab17806d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f15344ec8414de4c1cea277d88e39c7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01bf0b7b47f938b6334d139fee46c3b5 |
| publicationDate |
2012-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1701597-B1 |
| titleOfInvention |
Plasma generating electrode, its manufacturing method, and plasma reactor |
| abstract |
A plasma generating electrode (1) having two or more plate-shaped unit electrodes (2) opposed to each other and adapted to generate a plasma when a voltage is applied between the unit electrodes (2). At least one of the unit electrodes (2) includes a plate-shaped ceramic dielectric body (3) where at least one of the surfaces has grooves (5) and/or recesses and a conductive film (4) provided inside the ceramic dielectric body (3). When a voltage is applied between the unit electrodes (2), at edge potions (9) formed by the surface of the ceramic dielectric body (3) and the side surfaces of the grooves (5) and/or recesses, a plasma having a density higher than that of the plasma generated between the unit electrodes except for the edge portions (9) and its vicinities can be generated. |
| priorityDate |
2003-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |