| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dae64c775f32c43199adbb4389c2c9b3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcd7252d848cd52194750192bc6f8aed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e24b20e201bd24933be441916925993f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b89bf1120eb07019f66a388438f3d055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25b0c4601093b36c344eee75f5ff7b67 |
| publicationDate |
2006-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1698645-A1 |
| titleOfInvention |
Hyperbranched polymer, process for producing the same and resist composition containing the hyperbranched polymer |
| abstract |
The present invention provides a hyperbranched polymer suitable as a polymer material for nanofabrication, in particular, photolithography. The hyperbranched polymer of the present invention is characterized by having a core portion prepared by a living radical polymerization of chloromethyl styrene or the like, and an acid decomposition group such as p-tert-butoxy styrene, which is linked to the core portion and present at the end of a molecule of the polymer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2058338-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2058338-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1903395-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8338554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7629107-B2 |
| priorityDate |
2003-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |