http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1697729-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 |
| filingDate | 2004-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_553d3b3466669e79d0f8e16986c63a83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be17dd65b58f7e30ca8b93cf37d966df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8980c2c9b70969445af572d78c03c11a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b761e3ef4240387eda85d4ea5c47b07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_502a046ddc474d414f331df2f204d28c |
| publicationDate | 2010-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1697729-B1 |
| titleOfInvention | Methods for inspection of a specimen using different inspection parameters |
| abstract | Methods and systems for inspection of a specimen using different parameters are provided. One computer-implemented method includes determining optimal parameters for inspection based on selected defects. This method also includes setting parameters of an inspection system at the optimal parameters prior to inspection. Another method for inspecting a specimen includes illuminating the specimen with light having a wavelength below about 350 nm and with light having a wavelength above about 350 nm. The method also includes processing signals representative of light collected from the specimen to detect defects or process variations on the specimen. One system configured to inspect a specimen includes a first optical subsystem coupled to a broadband light source and a second optical subsystem coupled to a laser. The system also includes a third optical subsystem configured to couple light from the first and second optical subsystems to an objective, which focuses the light onto the specimen. |
| priorityDate | 2003-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.