| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4ff9ddf728a7e1a0b36c9cc38b89ad6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2867
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-287
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0491 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef0f6c52e5b0029db1e48963058951b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d262a117fc9319532605a5e3d9a94ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3062ba146a022470d7c7d1adb4a49d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad7ccc7cf0332865f986b16116c6698d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bb8318ac1edfa9da8e83639c66514d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3eeb60e3306bb38831a737dc7395c440
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c1e73a4cc683d68798e31b386382c3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e587bdf0a62663d516cf7d27c2d900ce |
| publicationDate |
2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1696479-A1 |
| titleOfInvention |
Contactor for reliability evaluation tester |
| abstract |
A reliability evaluation test apparatus (10) of this invention includes a wafer storage section (12) which stores a wafer (W) in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor (11) are totally in electrical contact with each other. The wafer storage section (12) transmits/receives a test signal to/from a measurement section (15) and has a hermetic and heat insulating structure. The wafer storage section (12) has a pressure mechanism (13) which presses the contactor (11) and a heating mechanism (14) which directly heats the wafer (W) totally in contact with the contactor (11) to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7646020-B2 |
| priorityDate |
2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |