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filingDate 2004-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01bf0b7b47f938b6334d139fee46c3b5
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publicationDate 2006-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1667498-A1
titleOfInvention Plasma producing electrode and plasma reactor
abstract A plasma generating electrode according to the invention includes at least two opposing plate-shaped unit electrodes 2, each having a rectangular surface and four end faces, and a holding member 5 which holds at least one (fixed end 6) of a pair of parallel ends (pair of ends) of four ends of the unit electrode 2 corresponding to the four end faces, at least one of the opposing unit electrodes 2 being a conductive-film-containing electrode 8 including a ceramic body 3 and a conductive film 4, and a distance "a" (mm) from an edge of the conductive film 4 to an edge of the ceramic body 3 on the other pair of parallel ends (other pair of ends 9) of the four ends of the conductive-film-containing electrode 8 adjacent to the pair of ends and a thickness "c" (mm) of the ceramic body 3 satisfying a relationship "(c/2) ≤ a ≤ 5c". The plasma generating electrode 1 is effectively prevented from breaking due to thermal shock.
priorityDate 2003-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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