| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6848d3dd4722aabb365524a2fcde9d4e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-54426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-54453 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00 |
| filingDate |
2004-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f89fc6fed26b09e2356db78de23316f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_079e22fb8faa452872af339a53c369f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abce4838b335aedf2eb0f008103e1021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0091638caba6e82689e8bdb6327f7a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad52feac69ca445bac16ce1904643655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cec26decb8c4de9df990f510596001d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf973ac9b516da4cb2a65f88c0ae795f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c67e4408af3f965d588c9f7a9cf076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_456ad1c6f4a664493c4d09c85a3f5824 |
| publicationDate |
2018-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1660403-B1 |
| titleOfInvention |
Fabricating nanoscale and atomic scale devices |
| priorityDate |
2003-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |