http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1652579-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a170f0c775faf133363d63241e0704e9 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0816 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502707 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-0093 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 |
filingDate | 2005-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c920e4aa9e96e3ccb1fa110c70e2369c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d0caa3149f9b3506788459d93dc934a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1da2006ce1dde76410d9e1197bc38f67 |
publicationDate | 2006-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | EP-1652579-A1 |
titleOfInvention | Fluidic systems comprising a capillary channel and process for their manufacture |
abstract | réaliser, à la surface d'une première plaquette (1) de silicium, au moins une première gorge (10) de dimensions données, réaliser dans une deuxième plaquette (2) de silicium des ouvertures traversantes (21,22), réaliser, par fusion, un assemblage (3) desdites première (1) et deuxième (2) plaquettes de manière à former un canal (10) qui est en contact avec lesdites ouvertures traversantes, et placer ledit assemblage dans une atmosphère oxydante de façon à former une couche d'oxyde de silicium sur les parois internes dudit canal (10), diminuant ainsi la section de ce dernier pour créer ledit capillaire. The method of manufacturing a fluidic system according to the invention is characterized in that it consists of: producing, on the surface of a first silicon wafer (1), at least a first groove (10) of given dimensions, producing through openings (21, 22) in a second silicon wafer (2), merging an assembly (3) of said first (1) and second (2) platelets to form a channel (10) in contact with said through openings, and placing said assembly in an oxidizing atmosphere to form a silicon oxide layer on the inner walls of said channel (10), thereby decreasing the section thereof to create said capillary. n n n The invention also relates to the fluidic systems obtained using the method. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110441539-A |
priorityDate | 2004-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.