http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1650573-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64fb9be47f5d12160109a1b3fcd174ef |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2851 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C29-56016 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2001-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f36325b3c078949cbb4ad7ab3fd37511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a483b3d66213e9433daff6d078db66a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e51359a725585b0d729aaea0146a1261 |
| publicationDate | 2011-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1650573-B1 |
| titleOfInvention | Counter balanced vertical docking motion in a driven vertical test head manipulator |
| abstract | A positioner, such as a test head carrier for a semiconductor wafer and device tester, includes a vertical support and a main arm for supporting a test head. The main arm is suspended for vernier movement by use of a counterbalancing force such as counterweights. The suspension of the main arm is performed at a mechanical advantage so that reduced counterblancing force and correspondingly large movements on the counterblance side are used to effect the vernier movement. The vertical support may be adjusted with a non-compliant drive such as a ball screw mechanism. The vernier movement can also be used to sense collisions and other positioning errors and actuation of the drive for the vertical support can be controlled accordingly. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I701449-B |
| priorityDate | 2000-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128491820 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6582 |
Total number of triples: 23.