http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1634110-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f4246e8fcebf17c365aced017a04c61 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0866 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-04 |
| filingDate | 2004-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35d00c6c2cee6886e382978ffe7823d8 |
| publicationDate | 2006-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1634110-A1 |
| titleOfInvention | Electromagnetic radiation detectors having a microelectromecanical shutter device |
| abstract | The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopper/shutter device. The MEMS flexible film chopper/shutter device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper/shutter device includes a detector material element and flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic shuttering devices are additionally provided for. |
| priorityDate | 2003-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.