abstract |
In a multilayered substrate obtained by laminating a plurality of substrates andnincluding plural kinds of functional elements therein, a first functional material film and ansecond functional material film are provided on the same plane and first and secondnfunctional elements are formed by the first and second functional material films,nrespectively. The functional material film may be formed on a transferring substrate by anthin film method and may be transferred to the substrate. |