| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bed86674f4c2293cfdb6c13ed53e0001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a83304bd8b67aefa43f84078e7a55b69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dde84b9898a552d710f9b67a6a1db2a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7b9ab5521de0619ff5b2f34693f858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3b10024b9fe3eb940006e1ae7cc8b26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J47-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-10 |
| filingDate |
2004-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f31462f7778e8a074e9d7e42154c50c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec3acea0ed262607038c752173afd7ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1035c6d677de8d851cd32d74506d7313
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8d089cef0bea41c4eeceb0e15583ed1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20f45def6b4ca92d0e497bb17bc5a2d7 |
| publicationDate |
2005-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1610365-A1 |
| titleOfInvention |
Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurry |
| abstract |
A material for purification of a semiconductor polishingnslurry that without changing of pH value, is capable ofnefficiently purifying a polishing slurry to thereby not onlynprevent metal contamination of a polished object asneffectively as possible but also achieve recycling of anpolishing slurry without any problem; a relevant module fornpurification of a semiconductor polishing slurry; and anprocess for purifying a semiconductor polishing slurry withnthe use thereof. In particular, a material for purificationnof a semiconductor polishing slurry characterized in that itncomprises a fibrous substrate having a functional groupncapable of forming a metal chelate or such a functional groupntogether with hydroxyl fixed onto at least the surfacenthereof. This material for purification of a semiconductornpolishing slurry is, for example, used in such a manner thatnit is inserted in a container fitted with polishing slurryninflow port and outflow port while ensuring passage ofnpolishing slurry flow. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8062429-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3425658-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009058275-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009058288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I797076-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009058277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009058278-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11648641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7838483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802609-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009058272-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009058287-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9437446-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2858097-A4 |
| priorityDate |
2003-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |