http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1558697-A1

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filingDate 2003-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6507db329b70eaa4def6ae0475066205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_262ca05fd767897b183df76accce6cda
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publicationDate 2005-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1558697-A1
titleOfInvention Fluorinated surfactants for buffered acid etch solutions
abstract The present invention is directed to certain fluorinated surfactants, and use thereof in acid etch solutions, such as in aqueous buffered acid etch solutions. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
priorityDate 2002-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 25.