abstract |
A method for recharging a crucible with polycrystalline silicon comprises addingnflowable chips to a crucible used in a Czochralski-type process. Flowable chips arenpolycrystalline silicon particles made from polycrystalline silicon prepared by a chemical vaporndeposition process, and flowable chips have a controlled particle size distribution, generallynnonspherical morphology, low levels of bulk impurities, and low levels of surface impurities.nFlowable chips can be added to the crucible using conventional feeder equipment, such asnvibration feeder systems and canister feeder systems. |