http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1543084-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b637f9f45afd69585579aa44456b785c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2003-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8fd210f5e9179dd5d33310110c99565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b1c40ffc6752c67adbe1eb8fbe578ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d686423b8594649e9f52a7468f93d3f7 |
| publicationDate | 2005-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1543084-A2 |
| titleOfInvention | Process for reducing dishing and erosion during chemical mechanical planarization |
| abstract | This invention is directed to a slurry system and process of metal removal from a substrate. This invention is useful for polishing a microelectronic device. This invention is especially useful for chemical mechanical planarization of a semiconductor wafer. The slurry system of the present invention includes a first slurry and a second slurry, wherein the first slurry has a higher abrasive concentration than the second slurry. The process of the present invention includes a first polish with the first slurry to partially remove metal from the substrate, and a second polish with the second slurry to further remove metal from the substrate |
| priorityDate | 2002-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 211.