| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be92719b856db86c092cc233e9512ca2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14411 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1645 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate |
2003-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81b8e53a210e74e6802a6050efae6600
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5f752698488bfcfe7aeb32d7131bd5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33a7662cdb63866369cab1d07c253bcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5169c42b8800730beb4ba6656b14d936
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3104f6e6b2efc972ba93c65c1635f984
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01ed64e1391e75fa344bf2a3c8eb69d3 |
| publicationDate |
2007-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1534525-A4 |
| titleOfInvention |
ELECTROSTATIC EXCITATOR FORMED BY A SEMICONDUCTOR MANUFACTURING PROCESS |
| abstract |
An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality ofpartition parts (50a) are formed on the electrode. Avibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching. |
| priorityDate |
2002-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |