Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_952c79234747a9bb803da7d46b0a33c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d7efdc1ce2d7474e9eff812bc73ee56 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
filingDate |
2003-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f201deb6daa4839a894267b7181f24f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_284c2428805e87467b944a3e6ddd3949 |
publicationDate |
2005-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1532289-A2 |
titleOfInvention |
Zirconium complex used for the cvd method and preparation method of a thin film using thereof |
abstract |
In the preparation of a PZT thin film by the liquid source CVD method, using zirconium tetrakis(isobutyrylpivaloylmethanate) as a zirconium precursor enables to obtain a constant composition ratio of films within a wide range of the substrate temperature, and negates the need for the thermal treatment alter the film preparation. Accordingly, the present invention provides a PZT thin film having a constant quality at a low cost. |
priorityDate |
2002-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |