| abstract |
An improved apparatus for producing microarrays of chemical and biochemical materials. The apparatus includes one or more pins (20), a holder (40) for the pins and a dispensing tray (60) for holding one or more liquids. The apparatus is microfabricated from semiconductor materials such as silicon, silicone oxides, silicon carbide, silicon nitride, polymers, ceramics, non-ferric alloys using chemical and physical microfabrication and photolithographic techniques. |