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filingDate 2004-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ed6e0191c94c3ccd1e186774b1edd3e
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publicationDate 2005-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1522565-A2
titleOfInvention Polishing composition and use thereof
abstract An acidic aqueous slurry composition comprising silica abrasive particles, an oxidizer, anquaternary ammonium hydroxide; and acid having a maximum pKa of about 2.5; and water isnprovided along with its use for polishing.
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