abstract |
In a thin-film field effect transistor with a MISnstructure, the materials of which the semiconductor andninsulating layers are made are polymers which are dissolvablenin organic solvents and have a weight average molecularnweight of more than 2,000 to 1,000,000. Use of polymers fornboth the semiconductor layer and insulating layer of TFTneliminates such treatments as patterning and etching usingnphotoresists in the prior art circuit-forming technology,nreduces the probability of TFT defects and achieves anreduction of TFT manufacture cost. |