| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B7-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B7-261 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2004-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21ad7c9840472ec7ea4916f8d304ef3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a60acff65f05d3b474caf06d492db80d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2bd297466f121f598c03712d7efcec2 |
| publicationDate |
2005-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1511026-A2 |
| titleOfInvention |
Method for manufacturing a master of an optical information recording medium, method for forming a pattern, a mater, a stamper, an optical information recording medium and a resist |
| abstract |
A method of manufacturing a master of an opticalninformation recording medium includes a resist layernformation step of using a resist to form a resist layer onnan upper surface of a substrate, an exposure step fornselectively exposing the resist layer to cause a change ofnstate in the resist layer, and a development step fornperforming an alkali development process on the resistnlayer after the exposure step. The resist is primarilyncomposed of an inorganic material and contains at least Tenand O, and further contains a stabilizing additive havingna lower solubility than TeO 2 in an alkaline environment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3343290-A4 |
| priorityDate |
2003-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |