| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14 |
| filingDate |
2004-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6d79cde08b870d5b5819b7c84d6c79e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2702610aff676a9cd3f2ea85bb8e3506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_224df69f89a283605039c0e3c1077f2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb8a633a60181c603461ac2114956429
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d759c035aa3fa1e009ecd80ae8bfd19a |
| publicationDate |
2005-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1510537-A1 |
| titleOfInvention |
Siloxane-based resin and interlayer insulating film formed using the same |
| abstract |
A siloxane-based resin having a novel structure and ansemiconductor interlayer insulating film using the same.nThe siloxane-based resins have a low dielectric constant innaddition to excellent mechanical properties and are usefulnmaterials in an insulating film between interconnect layersnof a semiconductor device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115449291-A |
| priorityDate |
2003-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |