abstract |
A process for producing an electrophotographicnphotosensitive member comprising the steps ofndepositing a non-single crystal material composednbasically of silicon atoms, on a cylindrical substratenin a deposition chamber, thereafter once taking thensubstrate with film out of the deposition chamber, thennreturning it to the deposition chamber, and thereafternagain depositing thereon a non-single-crystal materialncomposed basically of carbon atoms. In anothernembodiment, the process comprises the steps ofndepositing on a cylindrical substrate a photoconductivenlayer formed of a non-single crystal material,nsubjecting to surface processing the deposited filmnhaving protrusions present at its surface, andndepositing on the processed surface a surfacenprotective layer formed of a non-single-crystalnmaterial. Also disclosed is the electrophotographicnphotosensitive member thus obtained, and annelectrophotographic apparatus having that member. |