| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2004-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d10c066f8f78607802c47b4467619242 |
| publicationDate |
2005-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1505134-A1 |
| titleOfInvention |
Chemical mechanical planarization compositions for reducing erosion in semiconductor wafers |
| abstract |
An aqueous chemical mechanical planarizing composition includes an oxidizer fornpromoting barrier removal and an abrasive. Inhibitor decreases removals of a metalninterconnect. The composition has a carboxylic acid polymer having at least one repeat unitnof the polymer comprising at least two carboxylic acid functionalities, a pH of less than ornequal to 4 and a tantalum nitride removal rate of at least eighty percent of copper removalnrate at a pad pressure of 13.8 kPa. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010065125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2384258-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2384258-A1 |
| priorityDate |
2003-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |