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publicationDate 2005-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1504138-A2
titleOfInvention Method for using low dielectric constant film by electron beam
abstract A method for depositing a low dielectric constant film on a substrate. The method includes depositing a low dielectric constant film comprising silicon, carbon, oxygen and hydrogen in a chemical vapor deposition chamber. The method further includes exposing the low dielectric constant film to an electron beam at conditions sufficient to increase the hardness of the low dielectric constant film.
priorityDate 2002-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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