Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
filingDate |
2003-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03d4801a77ccc61ccce81da82be769bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c749823865e937d8011ac99042765473 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb5551cf2f56afd4fba6c37d36564a1c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_664d6ec30c7e15d3fa1749bc5f724b95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_370adb2d2415a8630e9a6d421e87a6a2 |
publicationDate |
2005-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1489650-A4 |
titleOfInvention |
POLISHING COMPOSITION AND METHOD FOR FORMING A WIRING STRUCTURE |
priorityDate |
2002-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |