| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00063 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01B1-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 |
| filingDate |
1998-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7dd97d9290b10c25b69332835e95528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c92c69343f6c354d394e6b5e90aa2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ce87dbbf630aaedb08242db1f6c8f8c |
| publicationDate |
2004-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1482067-A2 |
| titleOfInvention |
Vacuum evaporation apparatus |
| abstract |
The present invention relates to a vacuum evaporation apparatus comprisingna vacuum chamber; an evacuating system connected to said vacuum chamber, fornevacuating said vacuum chamber; an organic material evaporation source holding annorganic film material therein; an evacuating system connected to said organicnmaterial evaporation source for evacuating interior of said organic materialnevaporation source; and an on-off valve being able to open and close between interiornof said organic material evaporation source and interior of said vacuum chamber. |
| priorityDate |
1998-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |