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filingDate 2004-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6adee253c7aa84eaea6b629cdc21b2df
publicationDate 2004-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1471568-A1
titleOfInvention Precursors for metal containing films
abstract The present invention is a 1-azaallyl compound of the formula:n nand metal coordination complexes of a representative compound, such asnEt(N)C(tBu)CH 2 SiMe 3 , wherein Et = ethyl, tBu = tertiary butyl and Me = methyl, andnprocesses for depositing metal and metal compound films, such as metal nitride andnmetal oxide films on electronic materials substrates using CVD or ALD of those metalncoordination complexes of the compound.
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type http://data.epo.org/linked-data/def/patent/Publication

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