| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2059-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-16 |
| filingDate |
2004-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25211e9a353a0f67bfd5a7e189fd5efb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2327b4ec3d6793c4ef853046803456aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95ee0baaa4fb63073ec8111e3a750a5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff77ebeff18616fecc21d08b1d400496 |
| publicationDate |
2005-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1470907-A3 |
| titleOfInvention |
Method of manufacturing self-ordered nanochannel-array and method of manufacturing nanodots using the nanochannel-array |
| abstract |
A method of manufacturing a nanochannel-array and a method of fabricatingna nanodot using the nanochannel-array are provided. The nanochannel-arraynmanufacturing method includes: performing first anodizing to form a first aluminanlayer having a channel array formed by a plurality of cavities on an aluminumnsubstrate; etching the first alumina layer to a predetermined depth and forming anplurality of concave portions on the aluminum substrate, wherein each concavenportion corresponds to the bottom of each channel of the first alumina layer; andnperforming second anodizing to form a second alumina layer having an array of anplurality of channels corresponding to the plurality of concave portions on thenaluminum substrate. The array manufacturing method makes it possible to obtainnfinely ordered cavities and form nanoscale dots using the cavities. |
| priorityDate |
2003-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |