| abstract |
A cleaning sheet comprising a cleaning layer and anreleasable protective film laminated on the cleaning layer,nwherein each of the relative intensities of the fragment ionsnof CH 3 Si + , C 3 H 9 Si + , C 5 H 15 Si 2 O + , C 5 H 15 Si 3 O 3 + , C 7 H 21 Si 3 O 2 + , CH 3 SiO - ,nCH 3 SiO 2 - and Si + in the cleaning layer, when the protective filmnis peeled off the cleaning layer, is 0.1 or less according tontime-of-flight secondary ion mass spectrometry, relative tonC 2 H 3 + in the case of positive ion or O - in the case of negativenion. |