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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70891
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filingDate 2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_653843ff58dea733bc485da061e3f31e
publicationDate 2004-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1457802-A1
titleOfInvention Micro-mirror device including dielectrophoretic liquid
abstract A micro-mirror device includes a substrate (20) having a surface (22),nand a plate (30) spaced from and oriented substantially parallel to the surface ofnthe substrate such that the plate and the surface of the substrate define a cavityntherebetween. A dielectrophoretic liquid (53) capable of movement when annelectrical signal is applied to the micro-mirror device is disposed in the cavity,nand a reflective element (42) is interposed between the surface of the substratenand the plate such that the reflective element is adapted to move between a firstnposition and at least one second position. The dielectrophoretic liquid includesnat least one compound selected from the group consisting of siloxanes andnsilanes substantially free of asymmetrical ether linkages.
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priorityDate 2003-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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