| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0028 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37 |
| filingDate |
2002-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7413380411c2530b1cb629a0aa70870
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce4a2a17c61e9b4f64ba1b0f1182d21a |
| publicationDate |
2004-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1456342-A1 |
| titleOfInvention |
Cleaning sheet and process for cleaning substrate treatment device |
| abstract |
A cleaning sheet comprising: a cleaning layer; and a protective film treated with a releasing agent comprising a silicone, the protective film being provided as a separator on at least one side of the cleaning layer, wherein an amount of silicon e attached to the cleaning layer when the separator is peeled off from the cleaning layer is 0.005f g/m2 or less as calculated in terms of polydimetylsiloxane. |
| priorityDate |
2001-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |