| abstract |
The invention relates to a method of making a nanoscale electrochemical cell, and to a nanoscale electrochemical cell and to an electrochemical cell array. The method includes: depositing on a non-conducting substrate a first conductor; depositing on the conductor a semiconductor or a nonconductor; depositing on the semiconductor or nonconductor a second conductor; and forming a hole through the second conductor, the nonconductor or semiconductor, and the first conductor. The hole forms a well having a cross-sectional area cross-sectional area less than about 1 micron by 1 micron, and the first conductor, the insulator or semiconductor, and the second conductor comprise a wall of the well. |