| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_879f2523d8250cfae2043c6e99f85f92 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2918 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0605 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D06M11-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D06M10-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2002-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db21e18c0dc26468c97d26d8b4068550
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc69cd68597f928d67a99707e5f4be0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dce54f1febf016a2b63d0ce07e931359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e140d4db6535a6519d566a70e68a570
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1cfd12674df0748778e093609779eca |
| publicationDate |
2004-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1436442-A2 |
| titleOfInvention |
Amorphous hydrogenated carbon film |
| abstract |
The present invention concerns an improved process for the deposition of amorphous hydrogenated carbon film, more specifically an improved low temperature, low power and low vacuum cathodic sputtering process. The invention also concerns the film produced by said process and articles containing an amorphous hydrogenated carbon film coating. |
| priorityDate |
2001-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |