| abstract |
A method of manufacturing a semiconductor device (2) on a substrate (1), said semiconductor device comprising an active area (5, 6, 16) in the substrate (1) demarcated by spacers (10-13, 20-23) and arranged so as to contact an interconnect (29) including TiSi2; the method including, depositing an oxide layer (26) on the substrate (1); depositing and patterning a resist layer (27) on the oxide (26); reactive ion etching of the oxide (26) to demarcate the active area (5, 6, 16), using the patterned resist layer (27); removing the resist (27) by a dry strip plasma containing at least oxygen; depositing titanium(28) on the oxide (26) and the active area (5, 6, 16); forming the interconnect (29) as self-aligned TiSi2 by a first anneal, a selective wet etch, and a second anneal; the dry strip plasma including, as a second gaseous constituent, at least fluoride. |