| abstract |
The present invention provides the following process for produci ng andnthe like, which enables the production of an ether compound, which is usefulnfor chemical amplification type resist compositions, synthetic intermediates ofnpharmaceuticals, paints, or the like, with less side reaction and in high yield. n A process for producing an ether compound having a groupnrepresented by the general formula (II)n nwherein R 1 , R 2 and R 3 may be the same or different, and represent substitutednor unsubstituted alkyl, substituted or unsubstituted aryl or substituted ornunsubstituted aralkyl, or R 1 and R 2 form cycloalkyl together with an adjacentncarbon atom, n which comprises allowing a compound having a hydroxyl groupn(including a carboxyl group) to react with an alkenyl ether represented by thengeneral formula (I)n nwherein R 1 , R 2 and R 3 have the same significances as defined above, nrespectively. |