| abstract |
A gas purifying system (1) for purifying an object gas (X)nincludes a gas flow line (3) through which the object gas to benpurified flows from an object gas generation mechanism (2), andischarge reaction device (4) provided on a way of the gas flow line,na filter member (5) disposed in the discharge reaction devicenhaving a structure capable of trapping particular matterncontained in the object gas during a time when the object gasnpasses through the filter member; and a discharge generationndevice (7) operatively connected to the discharge reaction devicenfor causing electric field inside the discharge reaction devicenand generating discharge plasma therein. |