| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93d58c3fab3867279bd2c6afdfb5bf4b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10 |
| filingDate |
2002-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ee10f2ee62e83effeb8d9a67a219b03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e2e5a691e51635f8d86a95c32f96f5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72845159b2eb260c99faec8cf23599a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e0bd668d91671c543ce94bb655d0430 |
| publicationDate |
2009-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1381710-B1 |
| titleOfInvention |
Process and device for the deposition of a microcrystalline silicon layer on a substrate |
| priorityDate |
2001-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |