| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8a9982b1666c54b5bf02d6c944891e4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-08009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-08004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1055 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-034 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-1055 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-034 |
| filingDate |
2002-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_833688b4a591b24f4be0b2654139d430 |
| publicationDate |
2003-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1368868-A2 |
| titleOfInvention |
Barium fluoride high repetition rate uv excimer laser |
| abstract |
The invention relates to an excimer laser (10) which includes a source of a laser beam and one or more windows (16,18) which include barium fluoride. Another aspect of the invention relates to an excimer laser (10) which includes a source of a laser beam (11),one or more windows (16,18) which include barium fluoride and a source for annealing the one or more windows (16,18). Another aspect of the invention relates to a method of producing a predetermined narrow width laserbeam (11). |
| priorityDate |
2001-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |