| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_41686a979f961bce6a9855b4b409a5b8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M2037-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M2037-0053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0133 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-150984
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M37-0015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-14514
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-150282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-150022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61M37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61M5-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61M35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B61C1-00 |
| filingDate |
2002-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_427cfd5e6166e3e42142d282b6d0123f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02fc10a866e9d69ca9e65155263a5eda |
| publicationDate |
2003-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1364396-A2 |
| titleOfInvention |
Microprotrusion array and methods of making a microprotrusion |
| abstract |
A microprotrusion array is formed from a silicon wafer by a plurality of sequential plasma and wet isotropic and anisotropic etching steps. The resulting microprotrusions (14) have sharpened tips (18) or cutting edges formed by wet isotropic etching, wherein each microprotrusion has a substantially pyramid shape with each side (16) having a concave surface. The tip of each microprotrusion has a substantially flat top surface (20) extending parallel to base (12). |
| priorityDate |
2001-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |