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filingDate 2002-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1358670-A4
titleOfInvention PROCESS AND DEVICE FOR REMOVING REMAINS FROM THE MICROSTRUCTURE OF AN OBJECT
abstract There is provided a composition for removing residues from the microstructure of an object, comprising: carbon dioxide; an additive for removing the residues comprising a fluoride having the formula NR1R2R3R4F, where R1, R2, R3 and R4 are each independently a hydrogen or an alkyl group; and a co-solvent for dissolving said additive in said carbon dioxide at a pressurized fluid condition.
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