http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1347490-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6a123fae19df5b66979245cb41195f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0458 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-09 |
| filingDate | 2003-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b0646d40a36b53c74b5f5791498c307 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80cb78007c7eb630b9fa553d07db3281 |
| publicationDate | 2003-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1347490-A2 |
| titleOfInvention | Diaphragm accessory unit for scanning electron microscope |
| abstract | The invention relates to a scanning electron microscope with anSample chamber (2) and a detector arranged in the sample chambern(23-25) for electrons and one placed in the sample chambernSample table (16) with a sample holder, being at the sample tablenAperture system (15, 18-21) adjustable with respect to the sample holdernAperture (19-21) is provided between the sample holder and the detectornis.n n n The invention can in particular be designed as an additional module that can be accommodated on the sample table of a conventional scanning electron microscope. The system consisting of a scanning electron microscope and an additional unit is used to generate special contrasts, in particular a dark field contrast in transmission. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105548616-A |
| priorityDate | 2002-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.