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filingDate 2001-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e415152bd778fe1eb176f1fee6c339ec
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publicationDate 2003-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1340258-A2
titleOfInvention Thermally enhanced microcircuit package and method of forming same
abstract A thermally enhanced microcircuit package includes a microcircuit having a microcircuit device cavity that receives a microcircuit device. A microelectromechanical (MEMS) cooling module is operatively connected to the microcircuit package and forms a capillary pumped loop cooling circuit having an evaporator, condenser and interconnecting cooling fluid channels for passing vapor and fluid between the evaporator and condenser and evaporating and condensing the cooling fluid.
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