http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1337458-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_491fdc2d1e2d145cba2611c78d64b143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55381eca605520acc04357d70e22cee9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0073 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2001-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7e021899d020573abeae7e8ac4fd6b0 |
| publicationDate | 2003-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1337458-A1 |
| titleOfInvention | Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| abstract | The present publication discloses a capacitive pressure sensor structure, in particular for measurement of absolute pressure, and a method for manufacturing the sensor. The sensor comprises at least one fixed electrode (3), and at least one movable electrode (6, 7) electrically isolated from said fixed electrode (3) and spaced apaart (10) from said fixed electrode (3). According to the invention, a portion of said movable electrode (6, 7) is formed from a porous polycrystalline silicon layer (6) that in a finished component remains as an integral portion of said flexibly movable electrode (6, 7). |
| priorityDate | 2000-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.