| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b891dbe0773eb2c9764e394be1e6f6d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K2099-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2400-0638
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K2099-0078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2400-0439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K2099-0094 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-0268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K99-0015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K99-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K99-0001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K31-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D7-0694 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B43-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F15C5-00 |
| filingDate |
2002-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc130104f5d8aa183556faaaccb85e82 |
| publicationDate |
2005-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1331538-B1 |
| titleOfInvention |
Piezo-electrically controlled micro actuator for fluids |
| abstract |
A micro-fluid valve or pump has a piezoelectric control with a flat substrate, one side of which has a detent (10) with a link channel and a twin membrane layer extending from the substrate outer margin over the detent. The two membrane layers are joined together. One membrane is piezo-ceramic membrane which deflects into and out of the detent on electrical command. Preferred Features: The detent is dish-shaped. The second membrane (7) is also formed from a piezo-electric material with a similar thermal coefficient of expansion to that of the first (4). |
| priorityDate |
2002-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |